型號
Mode
技術(shù)參數
Technical Data
|
P431-2 |
P436-1 |
P431-1 |
P432-1 |
主極限真空度
Ultimate Vacuum |
≤2×10-6Pa |
10-6Pa |
≤3×10-7Pa |
≤3×10-8Pa |
烘箱真空
Baking Chamber Vacuum |
≤1×10-1Pa |
5 Pa |
2 Pa |
5 Pa |
烘箱工作空間
Baking Chamber Dimension |
Ф500×1200 mm |
Ф700×700 mm |
Ф460×500 mm |
Ф200×1200 mm |
真空系統
Vacuum System |
分子泵系統
Turbo Pump System |
分子泵系統
Turbo Pump
System |
離子泵系統
Ion Pump System |
冷凝泵系統
Cryopump System
|
******溫度
Max.Temperature |
650℃ |
600℃ |
600℃ |
600℃ |
溫度均勻性(軸向)
Temperature Uniformity |
≤±5℃三點(diǎn)測溫
(3 point measurement) |
±10℃ |
±5℃ |
≤±5℃三點(diǎn)測溫
(3 point measurement) |
抽氣速度
Pumping Speed |
≥450 L/S |
≥450L/S |
≥450L/S |
≥450L/S |
加熱功率
Heating Power |
12 KW |
18 KW(10可調,8固定)
(10 adjustable,8 fixed) |
9 KW |
10 KW |
總功率
Total Power |
15 KW |
22 KW |
13 KW |
15 KW |
加熱方式
Heating Mode |
外加熱
Outside Heating |
外加熱
Outside Heating |
內加熱
Inside Heating |
內加熱
Inside Heating |