| 項目/Item |
內容/ content |
真空容器尺寸
Vacuum container size |
φ1600×2000mm（SUS304不銹鋼）
φ1600×2000mm （SUS304 stainless steel） |
夾具轉軸旋轉直徑、數量、長(cháng)度
Fixture shaft rotation diameter, number, length |
6/8軸φ440 L=1700 |
真空度指標
Vacuum index |
1）極限真空度（常溫、空載、潔凈條件）：≤3.0×10-4Pa
Ultimate vacuum(Room temperature, no-load, clean conditions)：≤3.0×10-4Pa
2）恢復真空：從大氣抽至2.0×10-2 Pa≤7分鐘（空載）
Recovery vacuum：From the atmosphere 2.0×10-2 Pa≤7Minutes（no-load）
3）抽氣速率/ Pumping rate：≥25000L/S
4）靜態(tài)漏率/ Static leakage rate: ＜5×10-3 Pa/S
5）回填大氣時(shí)間/ Backfill atmospheric time: ＜2 min |
蒸發(fā)源
Evaporation source |
1) 電阻加熱式，功率≥30kwAC6～12V可調；利用可控硅調（SCR）壓模塊控制或變壓器。
Resistance heating type, power ≥ 30kw AC6 ~ 12V adjustable; using thyristor modulation (SCR) pressure module control or transformer.
2）蒸發(fā)電極：鎢絲，安裝數量17～24組/套。
Evaporation electrode: tungsten wire, installation number 17-24 units/ sets. |
硅油保護膜重合
Silicon oil protective film overlap |
1）硅油儲存罐及填充管道材質(zhì)：SUS304不銹鋼。
Silicone oil storage tank and filled pipe material: SUS304 stainless steel.
2）硅油儲存罐容積：容積≥20L。有目視和液位計，加熱器、溫度傳感器，保持在設定的恒溫狀態(tài),溫度******為50度。
Silicon oil storage tank volume: ≥ 20L. There are visual and level gauges, heaters, and temperature sensors that are kept at the set constant temperature, and the temperature is up to 50 degrees.
3）硅油儲存罐設有觀(guān)察窗。
Silicon oil storage tanks have observation windows.
4）DC等離子重合方式，DC0～6000V ，0～2A可調。
DC plasma overlap method, DC0 ~ 6000V, 0 ~ 2A adjustable. |
硅油流量控制
Silicon oil flow control |
采用針型閥控制/ Using needle valve control |
Ar填充系統
Ar filling system |
1） 填充管道： SUS304不銹鋼；
Filled pipe: SUS304 stainless steel;
2） 質(zhì)量流量控制器；
Mass flow controller |
裝機功率
Installed power |
～100KW |
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